SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20190333771A1
SERIAL NO

16476567

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A substrate processing apparatus includes an upper cup part including a first tubular portion and a second tubular portion that are formed each in a tubular shape capable of surrounding a substrate held by a substrate holder, the second tubular portion being connected to an upper side of the first tubular portion. The substrate processing apparatus also includes a cup moving unit that moves the upper cup part in a vertical direction with respect to the substrate holder to stop the upper cup part at each of a position where the first tubular portion surrounds the substrate, and a position where the second tubular portion surrounds the substrate.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
SCREEN HOLDINGS CO LTDTENJINKITA-MACHI 1-1 TERANOUCHI-AGARU 4-CHOME HORIKAWA-DORI KAMIGYO-KU KYOTO-SHI KYOTO 602-8585

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HIRAOKA, Nobuyasu Kyoto-shi, Kyoto, JP 14 98
NISHIDA, Takayuki Kyoto-shi, Kyoto, JP 9 27
OKITA, Nobuaki Kyoto-shi, Kyoto, JP 7 8
TSUDA, Shotaro Kyoto-shi, Kyoto, JP 6 6

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation