Substrate processing apparatus and substrate processing method

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United States of America Patent

PATENT NO 11114302
APP PUB NO 20190333771A1
SERIAL NO

16476567

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A substrate processing apparatus includes an upper cup part including a first tubular portion and a second tubular portion that are formed each in a tubular shape capable of surrounding a substrate held by a substrate holder, the second tubular portion being connected to an upper side of the first tubular portion. The substrate processing apparatus also includes a cup moving unit that moves the upper cup part in a vertical direction with respect to the substrate holder to stop the upper cup part at each of a position where the first tubular portion surrounds the substrate, and a position where the second tubular portion surrounds the substrate.

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Patent Owner(s)

  • SCREEN HOLDINGS CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hiraoka, Nobuyasu Kyoto, JP 17 139
Nishida, Takayuki Kyoto, JP 10 40
Okita, Nobuaki Kyoto, JP 18 18
Tsuda, Shotaro Kyoto, JP 7 12

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