Micromechanical devices with mechanical actuators

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United States of America Patent

PATENT NO 11639718
APP PUB NO 20190337798A1
SERIAL NO

16507932

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A planar micromechanical actuator suspended on opposing suspension zones including a neutral axis between the opposing suspension zones, first to fourth segments into which the planar micromechanical actuator is segmented between the opposing suspension zones, each including a first electrode and a second electrode which form a capacitor and are isolatedly affixed to each other at opposite ends of the respective segment along a direction between the opposing suspension zones so as to form a gap between the first and second electrode along a thickness direction, the gap being offset to the neutral axis along the thickness direction, and wherein the first to fourth segments are configured such that the planar micromechanical actuator deflects into the thickness direction by the first and fourth segment bending into the thickness direction and the second and third segments bending contrary to the thickness direction upon a voltage being applied to the first and second electrodes of the first to fourth segments.

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Patent Owner(s)

  • FRAUNHOFER - GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Conrad, Holger Dresden, DE 19 100
Gaudet, Matthieu Cottbus, DE 6 28
Schenk, Harald Dresden, DE 39 383
Uhlig, Sebastian Cottbus, DE 1 0

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