Use of voltage and current measurements to control dual zone ceramic pedestals

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United States of America Patent

PATENT NO 10633742
APP PUB NO 20190338422A1
SERIAL NO

15972850

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A controller for a substrate processing system includes a resistance calculation module configured to receive a first current and a second current corresponding to a first heater element and a second heater element, respectively, of a substrate support, receive a first voltage and a second voltage corresponding to the first heater element and the second heater element, respectively, calculate a first resistance of the first heater element based on the first voltage and the first current, and calculate a second resistance of the second heater element based on the second voltage and the second current. A temperature control module is configured to separately control power provided to the first heater element and the second heater element based on the first resistance and the second resistance, respectively, and respective relationships between the first and second resistances and first and second temperatures of the substrate support.

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Patent Owner(s)

  • LAM RESEARCH FOUNDATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chandrasekharan, Ramesh Portland, US 72 3916
Durbin, Aaron Portland, US 15 35
Jewell, Thomas G Tualatin, US 3 26
Rudolph, Dirk Dundee, US 11 12

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