Physical quantity sensor
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United States of America Patent
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Jul 6, 2021
Grant Date -
Nov 7, 2019
app pub date -
Jul 15, 2019
filing date -
Feb 28, 2017
priority date (Note) -
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status (Latency Note)
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Abstract
In a physical quantity sensor, a first substrate has a recess depressed from a second surface to provide a thin film section adjacent to a first surface, and a second substrate has a first surface bonded to the first surface of the first substrate, and has a hollow depressed from the first surface and facing the recess. The recess and the hollow have such sizes that a projected line defined by projecting an end of a bottom surface in the recess to the first surface of the first substrate surrounds an open end of the hollow. When the thin film section is displaced toward the hollow, a maximum tensile stress is generated at a position on a rear surface of the thin film section intersecting an extended line along a normal direction to the first surface of the first substrate and passing through the open end of the hollow.
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