PHYSICAL QUANTITY SENSOR

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20190339147A1
SERIAL NO

16511115

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In a physical quantity sensor, a first substrate has a recess depressed from a second surface to provide a thin film section adjacent to a first surface, and a second substrate has a first surface bonded to the first surface of the first substrate, and has a hollow depressed from the first surface and facing the recess. The recess and the hollow have such sizes that a projected line defined by projecting an end of a bottom surface in the recess to the first surface of the first substrate surrounds an open end of the hollow. When the thin film section is displaced toward the hollow, a maximum tensile stress is generated at a position on a rear surface of the thin film section intersecting an extended line along a normal direction to the first surface of the first substrate and passing through the open end of the hollow.

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Patent Owner(s)

Patent OwnerAddress
DENSO CORPORATION1-1 SHOWA-CHO KARIYA-CITY AICHI-PREF 448-8661

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HAYAKAWA, Yutaka Kariya-city, JP 7 30
YOKURA, Hisanori Kariya-city, JP 25 201

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