APPARATUS, SYSTEM AND METHOD TO REDUCE CRAZING
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United States of America Patent
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Nov 7, 2019
app pub date -
Apr 30, 2019
filing date -
May 6, 2018
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Abstract
A coating system that reduces parasitic currents that may cause crazing in coatings on a substrate. In one example, the system includes a pair of low impedance shunt paths to ground for parasitic AC currents generated from the plasma in the chamber. The low impedance shunts may be provided through a balanced triaxial connection between a power supply of each chamber and the magnetrons of each chamber. In another example, potential differences between adjacent chambers are minimized through synchronized power supply signals between chambers.
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