BULK ACOUSTIC WAVE SENSOR HAVING AN OVERMODED RESONATING STRUCTURE
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United States of America Patent
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Issued Date -
Nov 7, 2019
app pub date -
Dec 6, 2017
filing date -
Dec 7, 2016
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Abstract
A bulk acoustic wave sensor includes a delay layer. The sensor includes an acoustic mirror and a base resonator. The base resonator includes a piezoelectric layer and two electrodes. One or more delay layers are disposed adjacent to the base resonator. A delay layer may be disposed between the base resonator and the acoustic mirror, a delay layer may be disposed on the base resonator opposite to the acoustic mirror, or both. Each delay section is formed of high quality-factor material. The sensor may define a resonant frequency, and the thickness of each delay section may be an integer multiple of half-wavelengths of the resonant frequency.
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