SERIAL AIRLOCK ARCHITECTURE
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United States of America Patent
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Issued Date -
Nov 14, 2019
app pub date -
May 9, 2019
filing date -
May 10, 2018
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Abstract
An airlock system that includes a plurality of adjacent chambers successively arranged along a guide path. Predetermined pressures are produced in each chamber so that the predetermined pressure in each chamber is at a pressure different from the predetermined pressure produced in an adjacent chamber. Gate valves are positioned to separate adjacent chambers in order to maintain a pressure differential between the adjacent chambers.
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