Micro-mechanical sensor and method for manufacturing a micro-electro-mechanical sensor

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United States of America Patent

PATENT NO 10961116
APP PUB NO 20190345027A1
SERIAL NO

16395645

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Abstract

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A micro-electro-mechanical sensor comprises a first substrate comprising an element movable with respect to the first substrate and a second substrate comprising a first contact pad and a second contact pad. The first substrate is bonded to the second substrate such that a movement of the element changes a coupling between the first contact pad and the second contact pad.

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Patent Owner(s)

  • INFINEON TECHNOLOGIES DRESDEN GMBH & CO. KG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bieselt, Steffen Stadt Wehlen, DE 36 84
Landgraf, Erhard Dresden, DE 28 308
Meinhold, Dirk Chemnitz, DE 46 308

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