OPTOELECTRONIC DEVICE AND METHOD OF MANUFACTURING THEREOF
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United States of America Patent
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Nov 14, 2019
app pub date -
May 9, 2019
filing date -
May 11, 2018
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Abstract
An optoelectronic device and a method of manufacturing the same. The device comprising: a multi-layered optically active stack; an input waveguide, arranged to guide light into the stack; an output waveguide, arranged to guide light out of the stack; and anti-reflective coatings, located between both the input waveguide and the stack and the stack and the output waveguide; wherein the input waveguide and output waveguide are formed of silicon nitride.
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