FLUID CONTROL DEVICE
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United States of America
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Aug 13, 2019
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Aug 13, 2019
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Abstract
A fluid control device includes a piezoelectric pump having a piezoelectric element, a driving circuit that receives a driving power supply voltage applied thereto and drives the piezoelectric element, and a startup circuit disposed between the driving circuit and an input terminal for a power supply voltage. The startup circuit increases the driving power supply voltage to a voltage (V1) lower than a constant voltage (Vc) in a first stage (P1) after startup, maintains or decreases the driving power supply voltage in a second stage (P2) following the first stage (P1), and increases the driving power supply voltage to the constant voltage (Vc) in a third stage (P3) following the second stage (P2).
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