CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND MANUFACTURING METHOD THEREOF

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May 29, 2019
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May 29, 2019

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Abstract

A high output and high reliability capacitive micromachined ultrasonic transducer (CMUT) is provided. The capacitive micromachined ultrasonic transducer has a concave portion on a surface of at least one insulating film. The surface faces an air gap.

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Patent Owner(s)

Patent Owner	Address
CANON KABUSHIKI KAISHA	30-2 SHIMOMARUKO 3-CHOME OHTA-KU TOKYO 146-8501

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B06B:GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS I....

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Inventor Name	Address	# of filed Patents	Total Citations
Akiyama, Takahiro	Atsugi-shi, JP	69	282

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CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND MANUFACTURING METHOD THEREOF

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United States of America

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