Importance

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Abstract

A measuring device measures a displacement amount or a speed of a measured object, the measuring device including an irradiation optical system that irradiates the measured object, a collection optical system that collects a first beam and a second beam emitted from the measured object so as to overlap the first beam and the second beam on each other, a first detector that detects superimposed light in which the first beam and the second beam are superimposed on each other, and a second detector that detects a partial beam of the emitted beam emitted from the collection optical system. A detection result of the second detector changes according to a distance between the measuring device and the measured object.

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First Claim