STORAGE TANK, AND MATERIAL VAPORIZATION DEVICE AND LIQUID MATERIAL SUPPLY DEVICE PROVIDED WITH STORAGE TANK
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United States of America
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Issued Date -
Jan 2, 2020
app pub date -
Dec 12, 2017
filing date -
Dec 12, 2017
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention is a storage tank including: a tank; a tank main body that stores a liquid material; a cover body that covers an opening of the tank main body; a support body that is positioned opposite to the cover body; a seal body that is sandwiched by a flange provided at the opening end of the tank main body and the cover body; and tightening members that tighten the cover body and the support body, and is capable of, even when the thickness of the flange provided at the opening end of the tank main body is thin, attaching the cover body on the flange while maintaining a contact property.
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