METHOD AND APPARATUS FOR CONTROLLING EXHAUST PRESSURE FOR AN EXTREME ULTRAVIOLET GENERATION CHAMBER
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United States of America
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Dec 24, 2019
Grant Date -
Jan 2, 2020
app pub date -
Apr 19, 2019
filing date -
Apr 19, 2019
priority date (Note) -
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Abstract
An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.
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