LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200004057A1
SERIAL NO

16447474

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A laser processing apparatus disclosed in the present application includes: an optical deflection unit capable of changing a deflection direction of and outgoing energy of an incoming laser pulse by changes of a frequency of and an amplitude of a driving signal to be supplied; and a control unit configured to supply driving signals with amplitudes corresponding to respective frequencies. In a laser processing apparatus configured to process a workpiece by leading outgoing laser pulse of the optical deflection unit to the workpiece and irradiating the workpiece with the laser pulse, as the amplitude corresponding to each of the frequencies, the control unit supplies an amplitude having the ratio that is close to the lowest ratio among ratios of the outgoing energy with respect to the incoming energy of the laser pulse at an amplitude having the largest outgoing energy of the optical deflection unit.

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Patent Owner(s)

Patent OwnerAddress
VIA MECHANICS LTD2-3-1 IZUMI EBINA-SHI KANAGAWA 243-0488

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KATO, Mitsuru Kanagawa, JP 53 451
KIKUCHI, Masaru Kanagawa, JP 17 204
MATSUMOTO, Kazuya Kanagawa, JP 140 1718
SAKAMOTO, Atsushi Kanagawa, JP 120 1072
SATO, Masanori Kanagawa, JP 211 1462
WATANABE, Kazuo Kanagawa, JP 238 2474

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