METHOD FOR SELECTIVELY REMOVING NICKEL PLATINUM MATERIAL

United States of America

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Jan 9, 2020
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Jun 18, 2019
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Jun 18, 2019

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Abstract

A method of selectively removing NiPt material from a microelectronic substrate, the method comprising contacting the NiPt material with an aqueous etching composition comprising:

an oxidising agent;a strong acid; anda source of chloride.

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Patent Owner	Address
ENTEGRIS INC	129 CONCORD ROAD BILLERICA MA 01821

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C23F:NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM S....

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Inventor Name	Address	# of filed Patents	Total Citations
HONG, SeongJin	Cheongju-si, KR	15	22

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METHOD FOR SELECTIVELY REMOVING NICKEL PLATINUM MATERIAL

Number of patents in Portfolio can not be more than 2000

United States of America

16444262

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