CONDUCTIVE POROUS CERAMIC SUBSTRATE AND METHOD OF MANUFACTURING SAME
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United States of America
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Jan 9, 2020
app pub date -
Jun 28, 2019
filing date -
Jun 28, 2019
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Abstract
The present invention relates to a conductive porous ceramic substrate and a method of manufacturing the same, and more particularly to a conductive porous ceramic substrate, in which a porous ceramic substrate used as a chuck or stage for fixing a thin semiconductor wafer substrate or display substrate through vacuum adsorption is imparted with antistatic performance so as to prevent the generation of static electricity, and a method of manufacturing the same.
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