POLISHING APPARATUS AND CALIBRATION METHOD

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200016722A1
SERIAL NO

16504905

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An output of an eddy current sensor includes an impedance component. A film thickness measuring apparatus obtains film thickness information from the impedance component. Using a non-linear function between the film thickness information and the film thickness, the film thickness is obtained from the film thickness information. When a resistance component and a reactance component of the impedance component are associated with respective axes of a coordinate system having two orthogonal coordinate axes, the film thickness information is a reciprocal of a tangent of an impedance angle which is an angle formed by a straight line connecting a point on the coordinate system corresponding to the impedance component and a predetermined reference point, and a predetermined straight line.

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Patent Owner(s)

  • EBARA CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
NAKAMURA, Akira Tokyo, JP 269 2403

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