HARDMASK COMPOSITION, HARDMASK LAYER AND METHOD OF FORMING PATTERNS
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United States of America
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Jan 16, 2020
app pub date -
Jun 28, 2019
filing date -
Jun 28, 2019
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Abstract
A hardmask composition, a hardmask layer, and a method of forming patterns, the composition including a solvent; and a polymer that includes a substituted biphenylene structural unit, wherein one phenylene of the biphenylene of the substituted biphenylene structural unit is substituted with at least one of a hydroxy-substituted C6 to C30 aryl group, and a hydroxy-substituted C3 to C30 heteroaryl group.
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