COMPOSITION FOR SURFACE TREATMENT, METHOD FOR PRODUCING THE SAME, SURFACE TREATMENT METHOD USING COMPOSITION FOR SURFACE TREATMENT, AND METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE

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Jan 16, 2020
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Feb 19, 2018
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Feb 19, 2018

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Abstract

An object of the present invention is to provide a means for sufficiently removing residues remaining on a surface of a polished object to be polished.

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Patent Owner	Address
FUJIMI INCORPORATED	KIYOSU-SHI AICHI 452-8502

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
ISHIDA, Yasuto	Kiyosu-shi, Aichi, JP	21	59
ONISHI, Shogo	Kiyosu-shi, Aichi, JP	42	88
YOSHINO, Tsutomu	Kiyosu-shi, Aichi, JP	49	537
YOSHIZAKI, Yukinobu	Kiyosu-shi, Aichi, JP	28	87

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COMPOSITION FOR SURFACE TREATMENT, METHOD FOR PRODUCING THE SAME, SURFACE TREATMENT METHOD USING COMPOSITION FOR SURFACE TREATMENT, AND METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE

Number of patents in Portfolio can not be more than 2000

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16491102

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16491102

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