PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON-BASED COATINGS ON SURFACES

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200017960A1
SERIAL NO

16316004

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Systems and methods for producing carbon-based coatings featuring diamond-like carbon (DLC) structures on the internal surfaces of cylindrical or tube-like components is disclosed. The methods feature the use of plasma-enhanced chemical vapor deposition (PECVD) to provide a generally uniform coating on the surface. Longitudinally homogeneous plasma is ignited directly inside the tube-like component. A bipolar pulse with a reverse active plasma step is used. The pressure and bias voltage are selected so as to cause the deposition of a carbon-based coating on the inner surface.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • Owner owned or assignment not recorded

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gennaro, Salvatore Tucson, US 2 0
Tudhope, Andrew Tucson, US 6 30

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation