VAPORIZATION DEVICE AND VAPORIZATION SYSTEM
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United States of America
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Issued Date -
Jan 16, 2020
app pub date -
Mar 16, 2018
filing date -
Mar 16, 2018
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Abstract
In order to make it possible to accurately detect the liquid level of a liquid material in a container, a vaporization device is adapted to include: a container 10 that contains a liquid material X; a heater 30 that heats the liquid material X in the container 10; and a liquid level sensor 20 that detects the liquid level of the liquid material in the container 10, in which when viewing the inside of the container 10 from above, a vaporization region S1 in which the liquid material X is vaporized, and a liquid level stable region S2 different from the vaporization region S1 are configured to be formed, and the liquid level sensor 20 detects the liquid level of the liquid material X in the liquid level stable region S2.
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