METHOD OF FORMING WIRING ON SIDE PORTION OF SUBSTRATE

United States of America

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Jan 16, 2020
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Jun 24, 2019
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Jun 24, 2019

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Abstract

Disclosed is a method of forming wiring of a substrate includes masking a substrate side portion, on which the wiring will be formed, by attaching a deposition mask to the substrate; and forming the wiring on the substrate side portion based on sputtering after introducing the masked substrate into a chamber.

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Patent Owner(s)

Patent Owner	Address
TETOS CO LTD	CHUNGNAM
TETOS VACUUM EQUIPMENT (JIANGSU)CO LTD	NO 15 PARK ROAD WUYOU STREET YANNAN HIGH TECH ZONE YANCHENG 224000

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Inventor Name	Address	# of filed Patents	Total Citations
PARK, Yeong Ung	Cheonan-si, KR	1	0
SONG, Kun Ho	Asan-si, KR	6	10

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METHOD OF FORMING WIRING ON SIDE PORTION OF SUBSTRATE

Number of patents in Portfolio can not be more than 2000

United States of America

16449476

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16449476

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