MINIATURIZED AND RUGGEDIZED WAFER LEVEL MEMS FORCE SENSORS

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200024126A1
SERIAL NO

16254968

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Described herein is a miniaturized and ruggedized wafer level MEMS force sensor composed of a base and a cap. The sensor employs multiple flexible membranes, a mechanical overload stop, a retaining wall, and piezoresistive strain gauges.

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Patent Owner(s)

Patent OwnerAddress
NEXTINPUT INCMOUNTAIN VIEW CALIFORNIA 94043

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brosh, Amnon Santa Monica, US 20 551
Diestelhorst, Ryan Atlanta, US 26 281
Nasiri, Steven Los Altos Hills, US 8 246

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