PLANAR ROTARY AIR BEARING STAGE

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200025248A1
SERIAL NO

16519331

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Various embodiments of the present technology generally relate to precise rotary motion control systems. More specifically, some embodiments relate to systems, methods, and means for providing pressure to a non-contact rotary system. In some embodiments, the rotary system comprises a rotary shaft that can rotate three hundred and sixty degrees continuously. In order for the rotary system to be entirely non-contact with any surfaces of surrounding components or housing, pressure must be supplied to a rotary air bearing that floats the rotary unit above a surface. In some examples, the bottom air bearing is a vacuum preloaded (VPL) air bearing. As such, the VPL air bearing requires a supply of positive pressure and a supply of negative pressure to stabilize the rotary unit. The present technology provides a mechanism for providing pneumatic air to the air bearing without a physical connection to the rotary shaft or air bearing.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brown, Nathan Lyons Littleton, US 6 6
Wolf, Quinn Matthew Arvada, US 1 0

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