IN-PLANE TRANSLATIONAL VIBRATING BEAM ACCELEROMETER WITH MECHANICAL ISOLATION AND 4-FOLD SYMMETRY
Number of patents in Portfolio can not be more than 2000
United States of America
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Jan 23, 2020
app pub date -
Jul 20, 2018
filing date -
Jul 20, 2018
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Abstract
A vibrating beam accelerometer (VBA) with an in-plane translational proof mass that may include at least two or more resonators and be built with planar geometry, discrete lever arms, four-fold symmetry and a single primary mechanical anchor between the support base and the VBA. In some examples, the VBA of this disclosure may be built according to a micro-electromechanical systems (MEMS) fabrication process. Use of a single primary mechanical anchor may minimize bias errors that can be caused by external mechanical forces applied to the circuit board, package, and/or substrate that contains the accelerometer mechanism.
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