Importance

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Abstract

A vibrating beam accelerometer (VBA) with an in-plane pendulous proof mass, which may include one or more resonators, planar geometry, a single primary mechanical anchor between the support base and the VBA, a resonator connector structure connecting the resonators to the single primary anchor and a hinge flexure mechanically connecting the proof mass to the single primary anchor. The techniques of this disclosure specify how the resonators can be solidly attached to the single anchor without compromising performance caused by forces applied on or by the support base. The geometry of the VBA may prevent bias errors that may otherwise result from a force applied to the support base that reaches the mechanism of the VBA. An example of force applied to the support base, may include the thermal expansion mismatch between the material of the support base and the material of the VBA.

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First Claim