STRAIN GAUGE SENSOR ACCELEROMETER WITH IMPROVED ACCURACY

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200025793A1
SERIAL NO

16517061

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An MEMS or NEMS accelerometer adapted to measure an acceleration along a sensing axis includes a substrate featuring a plane; a mass having a central zone and suspended relative to the substrate; a single lever arm comprising: a first end connected to the substrate by means of a first connection adapted to allow rotation of the lever arm about a rotation axis perpendicular to the sensing axis, and a second end connected to the mass by means of a second connection adapted to transmit movement in translation of the mass to the lever arm whilst allowing rotation of the lever arm about the rotation axis; the second end of the lever arm being disposed at the level of the central zone of the mass; at least one strain gauge comprising: a first end connected to the substrate, and a second end connected to the lever arm.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
JOET, Loïc GRENOBLE, FR 7 5

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