STRAIN GAUGE SENSOR ACCELEROMETER WITH IMPROVED ACCURACY
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United States of America
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Issued Date -
Jan 23, 2020
app pub date -
Jul 19, 2019
filing date -
Jul 19, 2019
priority date (Note) -
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Abstract
An MEMS or NEMS accelerometer adapted to measure an acceleration along a sensing axis includes a substrate featuring a plane; a mass having a central zone and suspended relative to the substrate; a single lever arm comprising: a first end connected to the substrate by means of a first connection adapted to allow rotation of the lever arm about a rotation axis perpendicular to the sensing axis, and a second end connected to the mass by means of a second connection adapted to transmit movement in translation of the mass to the lever arm whilst allowing rotation of the lever arm about the rotation axis; the second end of the lever arm being disposed at the level of the central zone of the mass; at least one strain gauge comprising: a first end connected to the substrate, and a second end connected to the lever arm.
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