LIQUID SUPPLIER, OBJECTIVE LENS HOLDER, MICROSCOPE, AND LIQUID SUPPLY METHOD

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200026054A1
SERIAL NO

16588134

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A liquid supplier includes: a supply port which supplies a liquid to a space between an objective lens and an observation object; and a recovery port which recovers the liquid supplied from the supply port, wherein the supply port and the recovery port satisfy a condition where positions of the supply port and the recovery port differ from each other in a direction of an optical axis of the objective lens or a condition where positions of the supply port and the recovery port with respect to the optical axis differ from each other in a direction perpendicular to the optical axis of the objective lens or both conditions.

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Patent Owner(s)

  • NIKON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
YASOKAWA, Toshiki Tokyo, JP 1 0

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