IRRADIATION APPARATUS

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200026070A1
SERIAL NO

16514517

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In an MEMS projector (10), an image signal processing unit (110) outputs an inspection signal, and an inspection signal processing unit (114) outputs a light emission instruction signal. An inspection light source drive unit (112) outputs a light emission signal, and an inspection light source (13) radiates an inspection light. The inspection light radiated from the inspection light source (13) is reflected at the reflection position RP of a first support portion (22), and then received by a light receiver (14). Then, the light receiver (14) outputs a received light signal. Based on the received light signal, the inspection signal processing unit (114) detects the angle of the light deflecting mirror (20) around the X axial line.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Saito, Takao Tokyo, JP 136 1161

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