Photodissociation Frame Window, Systems Including a Photodissociation Frame Window, and Methods of Using a Photodissociation Frame Window
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United States of America
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Jan 23, 2020
app pub date -
Jul 18, 2018
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Jul 18, 2018
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Abstract
An apparatus, method, and frame window configured to clean mesa sidewalls of a template with photodissociation radiation. Material on the mesa sidewalls are removed from the mesa sidewalls by exposing the portion of a first gap adjacent to the mesa sidewalls to the photodissociation radiation.
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