FLOW RATE CONTROL APPARATUS, FLOW RATE CONTROL METHOD, AND PROGRAM RECORDING MEDIUM HAVING RECORDED THEREIN PROGRAM FOR FLOW RATE CONTROL APPARATUS
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United States of America
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Jan 23, 2020
app pub date -
Jun 20, 2019
filing date -
Jun 20, 2019
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Abstract
In order to provide a flow rate control apparatus capable of reducing pressure loss due to a downstream valve while enhancing responsiveness in flow rate control, a controller is designed to control the downstream valve on the basis of a flow rate deviation when a valve opening of the downstream valve is smaller than a predetermined valve opening. The controller is designed to control an upstream valve on the basis of the flow rate deviation when the valve opening of the downstream valve is the predetermined valve opening or more.
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