IMAGING APPARATUS, IMAGING SYSTEM, AND IMAGING METHOD

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200026316A1
SERIAL NO

16545497

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Abstract

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In order to discriminate sites in a sample effectively, an imaging apparatus according to an embodiment is provided with: a light detector for detecting light radiated from a sample irradiated with first-wavelength infrared light and second-wavelength infrared light from a light source; and a controller for adjusting the intensity of the first-wavelength infrared light or the intensity of the second-wavelength infrared light, and generating an image of the sample based on a detection result obtained by irradiating the sample with the first-wavelength infrared light and the second-wavelength infrared light simultaneously.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION2-3 MARUNOUCHI 3-CHOME CHIYODA-KU TOKYO 100-8331
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGYTOKYO 100-8921

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
IKEHARA, Sanae Tsukuba-shi, JP 5 0
IKEHARA, Yuzuru Tsukuba-shi, JP 25 102
LIU, Zhen Tokyo, JP 414 5359
TOTSU, Masahiro Tokyo, JP 9 129
YANAGAWA, Takuya Tokyo, JP 2 24

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