DIAGNOSTIC SYSTEM OF SUBSTRATE TRANSFER HAND
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Jan 23, 2020
app pub date -
Sep 21, 2017
filing date -
Sep 21, 2017
priority date (Note) -
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Abstract
A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.
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