DIAGNOSTIC SYSTEM OF SUBSTRATE TRANSFER HAND

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200027765A1
SERIAL NO

16337856

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Abstract

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A diagnostic system of a substrate transfer hand including a base part coupled to a hand tip portion of a robot arm and a substrate holding part coupled to the base part to hold a substrate, includes a camera which is secured to the base part and takes an image of the substrate holding part; and a diagnostic device which obtains image information of the image taken by the camera and diagnoses normality of the substrate holding part based on the image information.

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Patent Owner(s)

  • KAWASAKI JUKOGYO KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
FUJIMORI, Kazuo Akashi-shi, JP 6 1
GOTO, Hirohiko Akashi-shi, JP 29 94
SUMITOMO, Masahiko Kakogawa-shi, JP 3 0
TAN, Haruhiko Kobe-shi, JP 3 0
YAMASHITA, Katsuhiro Kakogawa-shi, JP 56 478
YOSHIDA, Tetsuya Kakogawa-shi, JP 125 408

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