CARRIER, VACUUM SYSTEM AND METHOD OF OPERATING A VACUUM SYSTEM
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United States of America
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Issued Date -
Jan 23, 2020
app pub date -
Mar 17, 2017
filing date -
Mar 17, 2017
priority date (Note) -
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Abstract
A carrier for use in a vacuum system is described. The carrier includes: a magnet arrangement including one or more first permanent magnets; one or more second permanent magnets; and a magnet device configured to change a magnetization of the one or more first permanent magnets. The carrier may be used for carrying a mask device or a substrate in the vacuum system. Further, a vacuum system and a method of operating a vacuum system are described.
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