CARRIER, VACUUM SYSTEM AND METHOD OF OPERATING A VACUUM SYSTEM

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200027767A1
SERIAL NO

15760181

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A carrier for use in a vacuum system is described. The carrier includes: a magnet arrangement including one or more first permanent magnets; one or more second permanent magnets; and a magnet device configured to change a magnetization of the one or more first permanent magnets. The carrier may be used for carrying a mask device or a substrate in the vacuum system. Further, a vacuum system and a method of operating a vacuum system are described.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
SAUER, Andreas Großostheim, DE 41 247
ZANG, Sebastian Gunther Mainaschaff, DE 3 0

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