THIN- FILM TRANSISTOR SUBSTRATE AND LUMINESCENT DEVICE
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United States of America
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Issued Date -
Jan 23, 2020
app pub date -
Jun 7, 2019
filing date -
Jun 7, 2019
priority date (Note) -
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Abstract
A thin-film transistor substrate includes a pixel circuit, an interlayer insulating film, electrodes, and a hard mask metal. The pixel circuit includes a thin film transistor. The interlayer insulating film has contact holes and covers the pixel circuit. The electrodes are exposed above a surface of the interlayer insulating film, and electrically coupled to the pixel circuit via the contact holes. The hard mask metal has openings at portions facing the contact holes and is provided on the surface of the interlayer insulating film.
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