MEMS DEVICE
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Feb 6, 2020
app pub date -
Mar 13, 2019
filing date -
Mar 13, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
According to one embodiment, a MEMS device is disclosed. The MEMS device includes a substrate, and a MEMS vibrator provided on the substrate. The MEMS vibrator includes a first vibration portion disposed above the substrate, and a control electrode to control a vibration property of the first vibration portion. The control electrode is disposed without contacting the first vibration portion.
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