SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Feb 13, 2020
app pub date -
Oct 22, 2019
filing date -
Oct 22, 2019
priority date (Note) -
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Abstract
In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.
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