APPARATUS FOR CLEANING SEMICONDUCTOR EQUIPMENT
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United States of America
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Issued Date -
Feb 20, 2020
app pub date -
Jun 14, 2019
filing date -
Jun 14, 2019
priority date (Note) -
Published
status (Latency Note)
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Abstract
An apparatus includes a first support member coupled to a casing and constructed to move along a first axis through the casing and rotate around the first axis, a second support member coupled to the first support member and constructed to move along a second axis perpendicular to the first axis, and an arm pivotally coupled to the second support member and constructed to rotate around a third axis perpendicular to the first axis and the second axis. The apparatus also includes a cleaning head attached to the arm and constructed to rotate around a longitudinal axis of the arm.
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