WAFER SURFACE TEST PREPROCESSING DEVICE AND WAFER SURFACE TEST APPARATUS HAVING THE SAME
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
N/A
Issued Date -
Feb 20, 2020
app pub date -
Jan 22, 2019
filing date -
Jan 22, 2019
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
A wafer surface test preprocessing device includes a chamber; a supporting component disposed in the chamber; an atomizer connected to a lateral side of the chamber; a cooling component connected to a bottom of the chamber; and a lid disposed on a top of the chamber. With the wafer surface test preprocessing device having the cooling component to thereby dispense with a ventilation device and collect hydrofluoric acid residues in the chamber at the bottom of the chamber, thereby saving costs and time effectively.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully