RETICLE CLEANING SYSTEM AND METHOD FOR USING THE SAME
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Feb 20, 2020
app pub date -
Oct 26, 2018
filing date -
Oct 26, 2018
priority date (Note) -
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Abstract
A method for cleaning a reticle includes rotating the reticle, providing a cleaning liquid to clean the reticle, detecting a static charge value on the reticle during rotating the reticle, and reducing static charges on the reticle in response to the detected static charge value. Hence, the electrostatic discharge (ESD) occurred to the reticle can be prevented.
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Cited Art Landscape
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