TOOL AND METHOD FOR CLEANING ELECTROSTATIC CHUCK
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United States of America
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Issued Date -
Feb 20, 2020
app pub date -
Mar 19, 2019
filing date -
Mar 19, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
A method includes transmitting a radiation toward an electrostatic chuck, receiving a reflection of the radiation, analyzing the reflection of the radiation, determining whether a particle is present on the electrostatic chuck based on the analyzing the reflection of the radiation, and moving a cleaning tool to a location of the particle on the electrostatic chuck when the determination determines that the particle is present.
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