DAMPING SYSTEM FOR A MOBILE MASS OF A MEMS DEVICE

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200062584A1
SERIAL NO

16462613

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Abstract

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The invention relates to a damping system for a mobile mass (2) of a MEMS device (1), the system being capable of preventing direct contact between the mass (2) and a surface element (3) of the MEMS device (1), the damping system comprising: a mechanical bumper (4) positioned between the mass (2) and the surface element (3); a system (5) for locking/unlocking the bumper (4), which comprises one branch (51) oriented towards the bumper (4) having a blocking end (53) and a pin joint (54) capable of pivoting the branch (51), the locking/unlocking system (5) defining two subsequent positions of the mass (2).

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Patent Owner(s)

Patent OwnerAddress
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESBAT LE PONANT 25 RUE LEBLANC 75015 PARIS 75015
SAFRAN2 BOULEVARD DU GÉNÉRAL MARTIAL VALIN 75015 PARIS 75015

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
LEHEE, Guillaume Jerome Francois Moissy-Cramayel, FR 2 3

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