ULTRAPURE WATER GENERATION AND VERIFICATION SYSTEM
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United States of America
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Issued Date -
Mar 5, 2020
app pub date -
Sep 4, 2019
filing date -
Sep 4, 2019
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Abstract
An ultrapure water (UPW) generation and verification system can include a cleaning chemical station, a cleanup column, a conductivity verification station, and a holding reservoir, in fluid communication with one another. The cleaning chemical station can be configured to selectably permit a flow of water to pass therethrough to the cleanup column or to block the flow of water and instead deliver a cleaning chemical to the cleanup column. The conductivity verification station can be configured to selectably perform at least one of the following: permit water to flow from the cleanup column to the holding reservoir; direct fluid to waste; or test the conductivity of the water for a purity level.
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