CUTTING APPARATUS WITH AUTO CHUCK CLEANING MECHANISM
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United States of America
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Issued Date -
Mar 19, 2020
app pub date -
Sep 19, 2018
filing date -
Sep 19, 2018
priority date (Note) -
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Abstract
A cutting apparatus is provided. The cutting apparatus includes a processing chamber, a chuck table, a transferring mechanism, and a cleaning member. The chuck table is disposed in the processing chamber and configured to hold a workpiece on a chuck surface of the chuck table. The transferring mechanism is configured to transfer the workpiece to the chuck surface or transfer the workpiece away from the chuck surface. The cleaning member, which is disposed in the processing chamber, is configured to move across and clean the chuck surface before the workpiece is transferred to the chuck table and/or after the workpiece is transferred away from the chuck table.
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