Importance

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Abstract

A method for manufacturing an active matrix substrate including a thin film transistor disposed for each pixel, and a first electrode and a first wiring line for touchscreen panel function includes: (A) a step of forming an oxide semiconductor layer, a gate insulating layer, and a gate electrode on a substrate; (B) a step of forming an insulating layer covering the gate electrode, the gate insulating layer, and the oxide semiconductor layer, and having a source-side aperture and a drain-side aperture through which portions of the oxide semiconductor layer are exposed; (C) a step of forming a source electrode within the source-side aperture and a drain electrode within the drain-side aperture; (D) a step of forming an interlayer insulating layer including an organic insulating layer and having a first contact hole through which a portion of the drain electrode is exposed; (E) a step of forming a first transparent electrically conductive film on the interlayer insulating layer and within the first contact hole; (F) a step of forming by using a metal film, on a portion of the first transparent electrically conductive film, an upper wiring portion to become an upper layer of the first wiring line; (G) a step of patterning the first transparent electrically conductive film to make a pixel electrode and form a lower wiring portion to become a lower layer of the first wiring line; (H) a step of forming a dielectric layer covering the pixel electrode and the first wiring line and having a second contact hole through which a portion of the first wiring line is exposed; and (I) a step of forming, on the dielectric layer and within the second contact hole, a common electrode which is electrically connected to the first wiring line within the second contact hole. When viewed from a normal direction of the substrate, a bottom face of the first contact hole at least partially overlaps a bottom face of the drain-side aperture, and a bottom face of the second contact hole at least partially overlaps a bottom face of the source-side aperture.

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First Claim