METHOD FOR DETECTING COAGULA ON COATER HEAD AND METHOD FOR FABRICATING OPTICAL DIAPHRAGM
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United States of America
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Mar 19, 2020
app pub date -
Oct 25, 2018
filing date -
Oct 25, 2018
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Abstract
The present application provides a method for detecting coagula on a coater head. The method includes: detecting a thickness value of a coating material (2) on a substrate along a coating direction thereof; acquiring a first thickness value and a second thickness value, and calculating a difference value; and comparing an absolute value of the difference value with a preset value, and outputting a feedback signal if the absolute value of the difference value exceeds the preset value.
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