TUNGSTEN DISSOLUTION INHIBITOR, AND POLISHING COMPOSITION AND COMPOSITION FOR SURFACE TREATMENT USING THE SAME
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United States of America
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Mar 26, 2020
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Sep 23, 2019
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Sep 23, 2019
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Abstract
The present invention is to provide means which can inhibit dissolution of tungsten-containing material by bringing a specific compound into contact with the tungsten-containing material. The present invention relates to a tungsten dissolution inhibitor which contains a sulfonic acid compound or a salt thereof containing a nitrogen atom and having a molecular weight of less than 1,000.
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