SPIN COATING APPARATUS, SYSTEM, AND METHOD
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United States of America Patent
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Issued Date -
Apr 2, 2020
app pub date -
Sep 19, 2019
filing date -
Sep 28, 2018
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Abstract
A spin coating apparatus, system, and/or method that increase the uniformity of a coating material on a substrate. The spin coating system may be specifically directed for use with polygonal shaped substrates. The spin coating system may include a process chamber within which the substrate is located, spinning on a chuck, during operation. The spin coating system may include gas injection ports that inject a gas into the process chamber so that the gas contacts the substrate along corner portions of its front surface. This injection of the gas increases pressure and prevents excessive build-up of the coating material that may otherwise occur when spin coating polygonal shaped substrates.
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